Diagnostics of electron temperature and density of atmospheric-pressure nonequilibrium Ar plasma by continuum emission measurement
Autor: | Onishi, Hiroshi, Yamazaki, Fuminori, Hakozaki, Yoshiro, Takemura, Masaki, Nezu, Atsushi, AKATSUKA, HIROSHI |
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Jazyk: | japonština |
Rok vydání: | 2022 |
Předmět: | |
Zdroj: | 第83回応用物理学会秋季学術講演会 講演予稿集. :07-045 |
ISSN: | 2436-7613 |
Popis: | 連続スペクトルにより、大気圧非平衡アルゴンプラズマの電子温度・密度の計測可能性を研究した。放電空間を限定できる放電装置を用い、絶対校正済の測定系で発光分光計測を実施した. このスペクトルを理論曲線でフィッティングする。Druyvesteyn 電子エネルギー分布関数を仮定すると適切な値が導出された。衝突輻射モデルによる励起状態密度と線スペクトル強度とのクロスチェックにより、妥当性を確認した。 The feasibility of spectroscopic measurement of electron temperature and density of atmospheric-pressure non-equilibrium argon plasma was investigated, applying optical emission spectroscopic measurement of a continuum spectrum due to electron-atom bremsstrahlung. Emission spectroscopy was performed with an absolutely calibrated measurement system using a discharge device that can limit the discharge space to one point. The obtained spectrum is fitted with a theoretical curve. Assuming the Druyvesteyn electron energy distribution function, appropriate electron temperature and density were derived. The validity was confirmed by the cross-check between the line spectral intensity and the excited state density calculated with the Ar collisional radiative model with atomic collisional processes. |
Databáze: | OpenAIRE |
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