低エネルギーXe原子による炭素スパッタリングのデータベース構築
| Autor: | Muramoto, Tetsuya, Hyakutake, Toru, Nishida, Michio, Kenmotsu, Takahiro |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: | |
| Zdroj: | 宇宙輸送シンポジウム: 講演集録 = Proceedings of Space Transportation Symposium. :1-10 |
| Popis: | 平成20年度宇宙輸送シンポジウム(2009年1月19日-20日, 宇宙航空研究開発機構宇宙科学研究本部) The molecular dynamics (MD) simulation is performed to calculate complete angular distributions of sputtered carbon under low-energy Xe ion bombardment on carbon material. The complete angular distribution is parameterized by the spherical harmonic (SH) transformation. Tables of total sputtering yields and SH coefficients are produced in the incident energy range from 100 eV to 500 eV and in the polar incident angle range from 0 deg to 80 deg. In this MD work, the target crystalline of the diamond structure is oriented randomly, and its bombarded surface is formed into plane. This is the modeling for the sputtering of polycrystalline target. In order to estimate the erosion of accelerator grids of an ion engine, one can include the effect of general rough surface through Monte-Carlo simulation using this sputtering database for plane surface. 形態: カラー図版あり 資料番号: AA0064292081 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|