Solid state crystallization of titanium oxide thin films, and modification of their optical and electric properties by post-depositional uniaxial compressive annealing

Autor: Ikuta, Takahiro, Hisatomi, Shohei, Oga, Tomoaki, Kaneko, Satoru, Matsuda, Akifumi, YOSHIMOTO, MAMORU
Jazyk: japonština
Rok vydání: 2020
Databáze: OpenAIRE