Excimer Laser Crystallization and Doping of Epitaxial Ga2O3 Thin Films for Ultraviolet Optoelectronics Devices

Autor:	Watanabe, Kazuki, Kai, Ryoya, Kaneko, Naho, Hisatomi, Shohei, Oga, Tomoaki, Kaneko, Satoru, Matsuda, Akifumi, YOSHIMOTO, MAMORU
Jazyk:	angličtina
Rok vydání:	2021
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::8a80c94b797a2a4b2e504f3fb27add08 http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100869460 Zobrazit plný text záznamu