| Autor: |
Noriko, Nitta, Hidetsugu, Tsuchida, Shigeo, Tomita, Sasa, Kimikazu, Koichi, Hirata, Hiromi, Shibata, Yoshimi, Hirano, Keisuke, Yamada, Atsuya, Chiba, Yuichi, Saito, Kazumasa, Narumi |
| Jazyk: |
japonština |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
連携重点研究2020(令和2)年度成果報告書. |
| Popis: |
Ion beam irradiation of Si induces the formation of fine structures on the surface by sputtering. In this study, the energy dependence of the formed structures was investigated by electron microscopy using fast C60 cluster ion beams. The size of the structures increases with increasing energy. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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