3D coating of ta-C films using FCVA method (The mechaincal properties of ta-C films deposited on the sidewall)

Autor:	Kato, Toyohiro, Kawai, Kotaro, Akasaka, Hiroki, Hirata, Yuki, OHTAKE, NAOTO
Jazyk:	angličtina
Rok vydání:	2022
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::74d3d936bcd48db4ee2a4958762b24fb http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100882004 Zobrazit plný text záznamu