FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices

Autor:	Teranishi, Minami, Chang, Tso-Fu Mark, Chen, Chun Yi, Yamane, Daisuke, Machida, Katsuyuki, Masu, Kazuya, Sone, Masato
Jazyk:	angličtina
Rok vydání:	2017
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::64c201dbf0242577412d38816363749b http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100743817 Zobrazit plný text záznamu