Non-contact prove method of ferroelectric property estimation of PbTiO3 based films for micro electro mechanical systems

Autor:	Ehara, yoshitaka, Utsugi, Satoru, Nakajima, Mitsumasa, Yamada, Tomoaki, Iijima, Takashi, nishida, ken, FUNAKUBO, HIROSHI
Jazyk:	angličtina
Rok vydání:	2012
Zdroj:	J. Mater. Res.. 27(No. 11):1430-1435
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::60ac1ed0d944850fbf13712d5b57127b http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100640453 Zobrazit plný text záznamu