Diagnostics of Electron Temperature and Density of Low-pressure Microwave Discharge Ar Plasma by Optical Emission Spectroscopy Based on Collisional Radiative Model

Autor:	Yamazaki, Fuminori, Nezu, Atsushi, AKATSUKA, HIROSHI
Jazyk:	angličtina
Rok vydání:	2019
Zdroj:	Abstracts of APSPT11.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::478b536f18c2213fa4fb0239bf9b0705 http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100811086 Zobrazit plný text záznamu