Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films

Autor:	Yasuoka, Shinnosuke, Mizutani, Ryoichi, Ota, Reika, Shiraishi, Takahisa, Takao, Shimizu, Yasui, Shintaro, Ehara, Yoshitaka, nishida, ken, Sakata, Osami, FUNAKUBO, HIROSHI
Jazyk:	angličtina
Rok vydání:	2022
Zdroj:	J. Ceram. Soc. Jpn.. 130(No. 7):436-441
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::2fcc6a455fa2437cec919f0b94ba0140 http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100889889 Zobrazit plný text záznamu