Diagnostic of Electron Temperature of Low - pressure Microwave Discharge Ar Plasma by Opt ical Emission Spectroscopy Based on Collisional Radiative Model

Autor:	Yamazaki, Fuminori, Nezu, Atsushi, AKATSUKA, HIROSHI
Jazyk:	japonština
Rok vydání:	2018
Zdroj:	第35回 プラズマ・核融合学会 年会 予稿集.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::11f84a5af91ffcf394c03c58ba150fcf http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100780664 Zobrazit plný text záznamu