Freeform optics measurements with the NANOMEFOS non-contact measurement machine

Jazyk:	angličtina
Rok vydání:	2009
Popis:	The NANOMEFOS non-contact measurement machine for freeform optics has been completed. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dris___01180::6f23a91f81b4156f48f5d5c0034b4062 https://research.tue.nl/en/publications/e1e75852-3f22-43e0-a823-a4c3cb09e6cc Zobrazit plný text záznamu