Silicon on insulator photonic integrated sensors: on-chip sensing and interrogation
| Jazyk: | angličtina |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
SOI
TS - Technical Sciences strain sensor Physics::Instrumentation and Detectors Physics NI - Nano Instrumentation Hardware_PERFORMANCEANDRELIABILITY ring resonators photonic sensing silicon-on-insulator ultrasound sensor Physics & Electronics 3x3 interferometer pressure sensor harsh environments on chip interrogation |
| Popis: | In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3x3 interferometer. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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