Poly-silicon nanowire sensor for sodium chloride concentration measurement
| Autor: | Yao-Chiang Kan, Chia Yu Yang, Wen-Kai Ho, Yao-Yaun Ho, Tsai-Chen Wu, Cheng-Chih Hsu |
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| Rok vydání: | 2013 |
| Předmět: |
Silicon
Materials science Time Factors Resolution (mass spectrometry) Transistors Electronic Sodium Biomedical Engineering Analytical chemistry Nanowire chemistry.chemical_element Biosensing Techniques Sodium Chloride Biomaterials Calibration Electrochemistry Humans Silicon nanowires Ions Nanowires Temperature Linearity Reproducibility of Results General Medicine Equipment Design Hydrogen-Ion Concentration Threshold voltage chemistry Hypertension Microscopy Electron Scanning |
| Zdroj: | Bio-medical materials and engineering. 24(1) |
| ISSN: | 1878-3619 |
| Popis: | In this paper, the poly-Si nanowire sensor was fabricated by top-down technique for sodium chloride concentration measurement. The results showed that the smallest threshold voltage and the best resolution were 1.65 V and 0.41 μM, respectively. Furthermore, the sensor can be reused more than 50 times which maintained acceptable performance and showed good linearity of the calibration within wide range of the concentration. Based on these results, it can be concluded that the proposed sensor has great potential to be used for measuring complicated sample with suitable modification on the surface of nanowires. |
| Databáze: | OpenAIRE |
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