Electrical characterization of PMNT thin films
| Autor: | Denis Remiens, Marc Aid, Gérard Tartavel, Emmanuel Defay, Eric Cattan, E. Fribourg-Blanc |
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| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) |
| Jazyk: | angličtina |
| Rok vydání: | 2003 |
| Předmět: |
Permittivity
Materials science Silicon chemistry.chemical_element 02 engineering and technology 01 natural sciences law.invention law 0103 physical sciences Materials Chemistry Electrical and Electronic Engineering Thin film 010302 applied physics business.industry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics Titanate Electronic Optical and Magnetic Materials Capacitor chemistry Control and Systems Engineering Electrode Ceramics and Composites Optoelectronics 0210 nano-technology business Platinum |
| Zdroj: | Ferroelectrics, 55 HAL |
| Popis: | This paper presents our investigation in characterization of thin films of lead magnesium niobate—lead titanate (PMNT). We deposited films by rf magnetron sputtering on platinized silicon. As-deposited films are annealed and electrical characterizations are performed with platinum top electrode. We present capacitance—voltage, current—field and permittivity versus thickness characteristics. These are analyzed in the view of structural and microstructural observations. Our primary aim in this work being the development of integrated capacitors, we draw some conclusions and future directions of study in the frame of this application. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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