Structural properties of Ge-Sb-Te alloys
| Autor: | Etienne Nowak, J. Garrione, Hatun Cinkaya, Guillaume Bourgeois, Adil Ozturk, Marie Claire Cyrille, Gabriele Navarro, Nicolas Guillaume, Arif Sirri Atilla Hasekioglu, Zahit Evren Kaya, Seref Kalem, Christelle Charpin-Nicolle |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Diffraction Materials science Scanning electron microscope Annealing (metallurgy) Analytical chemistry chemistry.chemical_element Germanium 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Electronic Optical and Magnetic Materials symbols.namesake chemistry 0103 physical sciences Materials Chemistry symbols Electrical and Electronic Engineering Fourier transform infrared spectroscopy Thin film 0210 nano-technology Raman spectroscopy Spectroscopy |
| Zdroj: | Solid-State Electronics |
| ISSN: | 0038-1101 |
| DOI: | 10.1016/j.sse.2021.108101 |
| Popis: | In this work, we have investigated the structural properties of Germanium (Ge)-Antimony (Sb)-Tellurium (Te) (GST) and Ge-rich GST thin film samples. The structural properties of the films are studied after annealing temperatures from room temperature to 450 degrees C. We performed the annealing procedure using a heat rate of 10 degrees C/min to achieve the target temperature for a duration of 10 min under N2 flow. After heat treatment, we carried out X-Ray Diffraction (XRD), Fourier Infra-Red Spectroscopy (FTIR), Raman Spectroscopy and Scanning Electron Microscopy (SEM) equipped with Energy-dispersive X-ray spectroscopy (EDS) to investigate the evolution of the structure in the samples. |
| Databáze: | OpenAIRE |
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