The first sub-deg/hr bias stability, silicon-microfabricated gyroscope

Autor: William Carr, Ahra Lee, Hyoungho Ko, Byoung-Doo Choi, Sangchul Lee, Seung-Joon Paik, Sangjun Park, Yonghwa Park, Geunwon Lim, Dong-il Dan Cho, Dadi Setiadi, R. Mozulay
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Zdroj: Scopus-Elsevier
Popis: The first sub-deg/hr bias stability gyroscope is fabricated in single crystal silicon using the SBM (sacrificial bulk micromachining) process. The quadrature error is a major concern in MEMS gyroscopes for high performance. To minimize the quadrature error, the fabricated gyroscope has a very flat bottom surface, which gives a highly symmetrical proof mass, and springs, which, in turn, provide high performance levels with significantly reduced quadrature error. The fabricated gyroscope has a bandwidth of 58 Hz, and 4-hr bias stability of 0.3 deg/hr.
Databáze: OpenAIRE