Scalable and number-controlled synthesis of carbon nanotubes by nanostencil lithography
| Autor: | Jongbaeg Kim, Jungwook Choi, Kisik Koh |
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| Rok vydání: | 2013 |
| Předmět: |
Materials science
Nano Express Silicon Stencil lithography Scalable growth Nanochemistry chemistry.chemical_element Nanotechnology Carbon nanotube Substrate (electronics) Condensed Matter Physics Stencil law.invention Materials Science(all) Number-controlled growth chemistry law Number-controlledgrowth General Materials Science Critical dimension Lithography |
| Zdroj: | NANOSCALE RESEARCH LETTERS(8) Nanoscale Research Letters |
| ISSN: | 1556-276X |
| DOI: | 10.1186/1556-276x-8-281 |
| Popis: | Controlled synthesis and integration of carbon nanotubes (CNTs) remain important areas of study to develop practical carbon-based nanodevices. A method of controlling the number of CNTs synthesized depending on the size of the catalyst was characterized using nanostencil lithography, and the critical dimension for the nanoaperture produced on a stencil mask used for growing individual CNTs was studied. The stencil mask was fabricated as a nanoaperture array down to 40 nm in diameter on a low-stress silicon nitride membrane. An iron catalyst used to synthesize CNTs was deposited through submicron patterns in the stencil mask onto a silicon substrate, and the profile of the patterned iron catalyst was analyzed using atomic force microscopy. The feasibility toward a scalable, number-, and location-controlled synthesis of CNTs was experimentally demonstrated based on the diameter and geometry of the apertures in the stencil mask. |
| Databáze: | OpenAIRE |
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