Partially fluorinated oxo-alkoxide tungsten(vi) complexes as precursors for deposition of WOx nanomaterials

Autor:	Hankook Kim, Lisa McElwee-White, Timothy J. Anderson, Ashley A. Ellsworth, Richard O. Bonsu, Christopher O’Donohue, Khalil A. Abboud, Amy V. Walker, K. Randall McClain, Roman Y. Korotkov
Rok vydání:	2014
Předmět:	Thermogravimetric analysis Chemistry Inorganic chemistry chemistry.chemical_element Chemical vapor deposition Crystal structure Tungsten Metathesis Nanocrystalline material Inorganic Chemistry chemistry.chemical_compound Alkoxide Polymer chemistry Fluorine
Zdroj:	Dalton Trans.. 43:9226-9233
ISSN:	1477-9234 1477-9226
Popis:	The partially fluorinated oxo-alkoxide tungsten(VI) complexes WO(OR)4 [4; R = C(CH3)2CF3, 5; R = C(CH3)(CF3)2] have been synthesized as precursors for chemical vapour deposition (CVD) of WOx nanocrystalline material. Complexes 4 and 5 were prepared by salt metathesis between sodium salts of the fluoroalkoxides and WOCl4. Crystallographic structure analysis allows comparison of the bonding in 4 and 5 as the fluorine content of the fluoroalkoxide ligands is varied. Screening of 5 as a CVD precursor by mass spectrometry and thermogravimetric analysis was followed by deposition of WOx nanorods.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fbd2c0e5fe266b509dd7b31c4925efb3 https://doi.org/10.1039/c4dt00407h Zobrazit plný text záznamu