Modelling of Phase Structure and Surface Morphology Evolution during Compound Thin Film Deposition
| Autor: | Gediminas Kairaitis, Arvaidas Galdikas |
|---|---|
| Přispěvatelé: | MDPI AG (Basel, Switzerland) |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
Ion beam mixing Diffusion Nanoparticle 02 engineering and technology Substrate (electronics) 01 natural sciences Physics::Fluid Dynamics Phase (matter) 0103 physical sciences Materials Chemistry Surface roughness Thin film 010302 applied physics Surfaces and Interfaces Atmospheric temperature range kinetic modeling 021001 nanoscience & nanotechnology Surfaces Coatings and Films thin films lcsh:TA1-2040 Chemical physics surface roughness compounds phase separation lcsh:Engineering (General). Civil engineering (General) 0210 nano-technology |
| Zdroj: | Coatings Volume 10 Issue 11 Coatings, Vol 10, Iss 1077, p 1077 (2020) |
| ISSN: | 2079-6412 |
| DOI: | 10.3390/coatings10111077 |
| Popis: | The dependences of the surface roughness and the phase structure of compound thin films on substrate temperature and flux of incoming particles are investigated by a proposed mathematical model. The model, which describes physically deposited thin compound film growth process is based on the Cahn&ndash Hilliard equation and includes processes of phase separation, adsorption, and diffusion. In order to analyze large temperature range and assuming deposition of energetic particles, the diffusion is discriminated into thermal diffusion, radiation-enhanced diffusion, and ion beam mixing. The model is adapted to analyze surface roughness evolution during film growth. The influences of the substrate temperature and incoming flux particles on the surface roughness are determined by a series of numerical experiments. The modelling results showed that the surface roughness increased as the substrate temperature rose. Besides, a similar relationship was discovered between substrate temperature and size of nanoparticles formed in binary films, so the increase in the surface roughness with the substrate temperature was attributed to the increase in size of nanoparticles. |
| Databáze: | OpenAIRE |
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