Infrared Gratings Based on SiC/Si-Heterostructures

Autor:	Carsten Rockstuhl, Oliver Ambacher, Christian Förster, Hans Peter Herzig, André Leycuras, Jörg Pezoldt
Rok vydání:	2005
Předmět:	Fabrication Materials science Silicon Infrared Phonon business.industry Mechanical Engineering chemistry.chemical_element Heterojunction Substrate (electronics) Grating Condensed Matter Physics Optics chemistry Mechanics of Materials Polariton Optoelectronics General Materials Science business
Zdroj:	Materials Science Forum. :433-436
ISSN:	1662-9752
DOI:	10.4028/www.scientific.net/msf.483-485.433
Popis:	The fabrication process and the spectral properties of gratings for the infrared wavelength region on the basis of 3C-SiC layers grown by CVD on (100) oriented Si substrates are demonstrated. The formed 3C-SiC gratings on Si support two phonon polaritons as a function of the geometrical properties excited between 10.3 and 11.4 µm. They appear as a dip in the transmission spectrum. A third minimum in the transmission spectrum is caused by the substrate – grating interaction. The obtained resonances were polarization sensitive, i.e. they appeared only under TMpolarized illumination.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fb9ff9e6deca621cb3b139d73feecac5 https://doi.org/10.4028/www.scientific.net/msf.483-485.433 Zobrazit plný text záznamu