Quantitative X-Ray Analysis: The Basics
| Autor: | Dale E. Newbury, Linda Sawyer, Charles E. Lyman, Patrick Echlin, Joseph R. Michael, Eric Lifshin, Joseph I. Goldstein, David C. Joy |
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| Rok vydání: | 2003 |
| Předmět: | |
| Zdroj: | Scanning Electron Microscopy and X-ray Microanalysis ISBN: 9781461349693 Scanning Electron Microscopy and X-Ray Microanalysis ISBN: 9781461276531 |
| Popis: | As discussed in Chapters 5 and 6, the x rays emitted from a specimen bombarded with the finely focused electron beam of the scanning electron microscope (SEM) or electron-probe microanalyzer (EPMA) can be used to identify which elements are present (qualitative analysis). With the proper experimental setup and data-reduction procedures, the measured x rays can also be used to quantitatively analyze chemical composition with an accuracy and precision approaching 1%. This chapter provides an overview of the basic principles and techniques used for determining chemical composition, on the micrometer scale, with the SEM and EPMA. Our intention is to provide the conceptual basis for an understanding of the x-ray microanalytical data-reduction procedures that today are almost always incorporated into black-box computer-based, integrated analysis systems with which the analyst interacts as a user. As a user, the analyst depends on the knowledge and skill of programmers to have devised an accurate, robust analytical procedure from the diverse approaches available in the literature. Despite the apparent disconnection which has arisen between the analyst as user and the underlying physics as incorporated into the algorithms of the software, it is nevertheless extremely important to grasp the underlying physical principles to become a sophisticated analyst rather than a mere user. |
| Databáze: | OpenAIRE |
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