| Autor: |
A. van den Berg, Roald M. Tiggelaar, T.T. Veenstra, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Remco G.P. Sanders |
| Přispěvatelé: |
Faculty of Science and Technology, Mesoscale Chemical Systems |
| Rok vydání: |
2002 |
| Předmět: |
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| Zdroj: |
Talanta, 56(2), 331-339. Elsevier |
| ISSN: |
0039-9140 |
| Popis: |
This paper describes the design, realization and characterization of a micromachined light detection cell. This light detection cell is designed to meet the specifications needed for a micro total analysis system in which ammonia is converted to indophenol blue. The concentration of indophenol blue is measured in a light detection cell. The light detection cell was created using KOH/IPA etching of silicon. The KOH/IPA etchant was a 31 wt.% potassium hydroxide (KOH) solution with 250 ml isopropyl alcohol (IPA) per 1000 ml H(2)O added to it. The temperature of the solution was 50 degrees C. Etching with KOH/IPA results in 45 degrees sidewalls ({110} planes) which can be used for the in- and outcoupling of the light. The internal volume of the realized light detection cell is smaller than 1 mul, enabling measurements on samples in the order of only 1 mul. Measurements were performed on indophenol blue samples in the range of 0.02 to 50 muM. In this range the measurements showed good reproducibility. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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