Heterogeneous integration of uni-travelling-carrier photodiodes using micro-transfer-printing on a silicon-nitride platform
| Autor: | Sam Lemey, Camiel Op de Beeck, Dennis Maes, Muhammad Muneeb, Gunther Roelkens, Bart Kuyken, Emilien Peytavit, Maximilien Billet, Mohammed Zaknoune, Stijn Poelman |
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| Přispěvatelé: | Department of Information Technology (INTEC), Universiteit Gent = Ghent University [Belgium] (UGENT), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Photonique THz - IEMN (PHOTONIQUE THZ - IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Universiteit Gent = Ghent University (UGENT), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Renatech Network |
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Materials science
Technology and Engineering business.industry Optical power 7. Clean energy Waveguide (optics) Photodiode law.invention chemistry.chemical_compound Responsivity [SPI]Engineering Sciences [physics] Silicon nitride chemistry law Transfer printing Optoelectronics Quantum efficiency Photonics business ComputingMilieux_MISCELLANEOUS |
| Zdroj: | 2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC) 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), Jun 2021, Munich, Germany. ⟨10.1109/CLEO/Europe-EQEC52157.2021.9542787⟩ |
| Popis: | High-speed photodiodes often compromise responsivity in exchange for a reduced footprint. However, using waveguide photodiodes circumvents this limitation [1] . We combine uni-travelling-carrier photodiodes (UTC PDs) on a silicon nitride (SiN) photonic platform to achieve both high responsivity and high speed detectors. The SiN-platform has excellent properties such as low-loss waveguides and does not suffer from two-foton absorption at high optical power. A high responsivity is obtained through evanescent coupling of waveguide UTC photodiodes to SiN waveguides while still maintaining a small footprint. |
| Databáze: | OpenAIRE |
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