The role of silicon micromachining in optical fiber sensing technologies
| Autor: | L. Thiery, C. Gorecki, M. de Labachelerie |
|---|---|
| Přispěvatelé: | Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des sciences et matériaux pour l'électronique et d'automatique (LASMEA), Université Blaise Pascal - Clermont-Ferrand 2 (UBP)-Centre National de la Recherche Scientifique (CNRS), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC) |
| Rok vydání: | 2003 |
| Předmět: |
Microelectromechanical systems
Materials science Optical engineering 020208 electrical & electronic engineering Nanotechnology Context (language use) 02 engineering and technology Surface micromachining 020210 optoelectronics & photonics Fiber optic sensor Microsystem 0202 electrical engineering electronic engineering information engineering Micro-Opto-Electro-Mechanical Systems Electrical and Electronic Engineering Instrumentation Electronic circuit |
| Zdroj: | IEEE Sensors Journal IEEE Sensors Journal, Institute of Electrical and Electronics Engineers, 2003, 3, pp.121-130 IEEE Sensors Journal, 2003, 3, pp.121-130 HAL |
| ISSN: | 1530-437X |
| DOI: | 10.1109/jsen.2003.810234 |
| Popis: | Silicon micromachining has the advantage of small scale and easy integration with electronic circuits and sensors, resulting in the production of miniaturized and smart microsystems with moving parts. The size of the microelectromechanical systems/microoptoelectromechanical systems devices is immediately compatible with the size of integrated optics (IOs), and is appropriate to control or manipulate optical radiations. This technology is, therefore, suitable to fabricate precision-defined optical components and offers relatively easy alignment procedures of optical parts. This paper examines the contribution of micromachined structures in the specific context of optical fiber sensing technology. A number of demonstrator sensors will be discussed, with special emphasis on sensors with micromachined IO structures, nanoscale scanning optical microscope sensors, and fiber IO circuits coupling systems. |
| Databáze: | OpenAIRE |
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