Lab-level and low-cost fabrication technique for polymer based micro-optical elements and holographic structures
| Autor: | Rahlves, Maik, Rezem, Maher, Kelb, Christian, Boroz, Kristian, Gödeke, Dina, Schlangen, Sebastian, Reithmeier, Eduard, Roth, Bernhard, Hrabovský, Miroslav, Sheridan, John T., Fimia, Antonio |
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| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
Fabrication
Materials science Lithography Polymers Holography Sheet molding compounds Photoresist Micro-optical elements law.invention Nanoimprint lithography Replication accuracies Optics law Diffractive optical elements ddc:530 Microstructure Konferenzschrift Photoresists business.industry Holographic structures Density (optical) Liquid crystals Illumination technology Holograms Topography measurement Costs Hot embossing process Resist Liquid crystal devices Optoelectronics Digital mirror devices Dewey Decimal Classification::500 | Naturwissenschaften::530 | Physik Digital devices business Liquid crystal displays Maskless lithography |
| Zdroj: | Holography: Advances and Modern Trends IV : 15-16 April 2015, Prague, Czech Republic Proceedings of SPIE 9508 (2015) |
| Popis: | Polymer based diffractive optical elements have gained increasing interest due to their potential to be used in various applications such as illumination technology, micro optics and holography. We present a novel production process to fabricate polymer based diffractive optical elements and holograms. The process is based on maskless lithography, which is used to fabricate optical elements in photoresist. We discuss several lab-made lithography setups based on digital mirror devices and liquid crystal devices with respect to light efficiency, resolution and contrast. The whole optical setup is designed with an emphasis on low-cost setups, which can be easily implemented in an optical research lab. In a subsequent step, a copy of the microstructures is easily replicated into optical polymeric materials by means of a soft stamp hot embossing process step. The soft stamp is made from Polydimethylsiloxan, which is coated onto the microstructure in resist. The hot embossing process is carried out by a self-made and low-cost hot embossing machine. We present confocal topography measurements to quantify the replication accuracy of the process and demonstrate diffractive optical elements and holographic structures, which were fabricated using the process presented. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only. DFG/CRC/PlanOS German Federation of Industrial Research Associations (AiF)/EFB ZN 500 |
| Databáze: | OpenAIRE |
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