Integrated Hybrid MEMS Hydrogen Sensor with High Sensitivity and High Dynamic Range

Autor:	Naofumi Nakamura, Hiroaki Yamazaki, Akihiro Kojima, Tomohiro Saito, Yumi Hayashi, Daiki Ono, Kei Masunishi
Rok vydání:	2020
Předmět:	Microelectromechanical systems Thermal conductivity Materials science business.industry Capacitive sensing Mechanical Engineering Energy Engineering and Power Technology Optoelectronics Sensitivity (control systems) Electrical and Electronic Engineering business Hydrogen sensor High dynamic range
Zdroj:	IEEJ Transactions on Sensors and Micromachines. 140:158-164
ISSN:	1347-5525 1341-8939
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f81f41172889cbaf93553e157ff87efc https://doi.org/10.1541/ieejsmas.140.158 Zobrazit plný text záznamu