Local reflectance spectra measurements of surfaces using coherence scanning interferometry
| Autor: | Denis Montaner, Paul Montgomery, Manuel Flury, Rémy Claveau |
|---|---|
| Přispěvatelé: | Laboratoire des sciences de l'ingénieur, de l'informatique et de l'imagerie (ICube), Institut National des Sciences Appliquées - Strasbourg (INSA Strasbourg), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-École Nationale du Génie de l'Eau et de l'Environnement de Strasbourg (ENGEES)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS), École Nationale du Génie de l'Eau et de l'Environnement de Strasbourg (ENGEES)-Université de Strasbourg (UNISTRA)-Institut National des Sciences Appliquées - Strasbourg (INSA Strasbourg), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National de Recherche en Informatique et en Automatique (Inria)-Les Hôpitaux Universitaires de Strasbourg (HUS)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
[SPI.OTHER]Engineering Sciences [physics]/Other
Spectral signature Materials science Spectrometer business.industry 02 engineering and technology 021001 nanoscience & nanotechnology Linnik interferometer reflectance spectra measurements 01 natural sciences Optical spectrometer Interference microscopy law.invention 010309 optics Interferometry coherence scanning interferometry Optics White light scanner law 0103 physical sciences Coherence scanning interferometry 0210 nano-technology business |
| Zdroj: | Optical Micro-and Nanometrology VI SPIE Photonics Europe 2016 SPIE Photonics Europe 2016, Apr 2016, Bruxelles, Belgium. ⟨10.1117/12.2227625⟩ |
| Popis: | International audience; Interference microscopy is a widely used technique in optical metrology for the characterization of materials and in particular for measuring the micro and nanotopography of surfaces. Depending on the processing applied to the interference signal, either topographic analysis of the sample can be carried out by identifying the envelope peak of the fringe signal, which leads to 3D surface imaging, or spectral analysis may be performed which gives spectroscopic measurements. By applying a Fourier transform to the interference fringes, information about the source spectrum, the spectral response of the optical system, and the reflectance spectrum of the surface at the origin of the interferogram can be obtained. By using a sample of known reflectivity for calibration, it is possible to extract the spectral signature of the entire system and therefore to deduce that of the surface of interest. In this paper, we first explain theoretically how to retrieve the reflectance information of a surface from the interferometric signal. Then, we present some results obtained by this means with a white light scanning Linnik interferometer on different kinds of samples (silicon, tin oxide (SnO2), indium tin oxide (ITO)). The initial results were slightly different from those obtained with a conventional optical spectrometer until averaged temporally and were improved even further when averaged spatially. We show that the reflectance of the surface can be calculated over the given wavelength range of the effective spectrum, which is defined as the source spectrum multiplied by the spectral response of the camera and the spectral transmissivity of the optical system. We thus demonstrate that local spectroscopic measurements can be carried out with an interference microscope and that they match well with those measured with an optical spectrometer model Lambda19 UV-VIS-NIR from Perkin Elmer. A simulation study is also presented in order to validate the method and to help identify the potential sources of errors in the spectroscopic analysis. |
| Databáze: | OpenAIRE |
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