High temperatures BVD model for AlN-based solidly mounted resonators

Autor: J.M. Carmona-Cejas, Carlos Collado, Jimena Olivares, Jordi Mateu, E. Lugo-Hernandez, Marta Clement, Teona Mirea
Přispěvatelé: Universitat Politècnica de Catalunya. Doctorat en Teoria del Senyal i Comunicacions, Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions, Universitat Politècnica de Catalunya. CSC - Components and Systems for Communications Research Group
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: UPCommons. Portal del coneixement obert de la UPC
Universitat Politècnica de Catalunya (UPC)
Popis: In this paper we present an updated version of the well-known one dimensional model for Solidly Mounted Resonators (SMRs) based on Aluminum Nitride (AIN) for harsh environments at 2.4 GHz in sensing applications. Our model covers from 22°C up to 422°C and presents this performance. Qa=900,Or=350 and keff=6.17% at 22°C to a Qa=380,Qr=150 and keff=5.48% at 422°C Also we have verified our model using measurements from fabricated SMRs with an acoustic reflector of seven alternating layers of low and high acoustic impedance. This work was supported by the next projects: TEC2017-84817-C2-2-R, TEC2017-88343-C4-2-R, TEC2017-84817-C2-1-R, 2017 SGR-813 and Conacyt-México.
Databáze: OpenAIRE