Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning
| Autor: | U. Schöneberg, Wilfried Mokwa, B.J. Hostika, H.G. Dura, Holger Vogt |
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| Přispěvatelé: | Publica |
| Rok vydání: | 1992 |
| Předmět: |
Materials science
measurement probe Hydrogen Materialtechnik chemistry.chemical_element Hardware_PERFORMANCEANDRELIABILITY gas sensor law.invention gassensor law Hardware_INTEGRATEDCIRCUITS Materials Chemistry Electrical and Electronic Engineering Instrumentation Signal conditioning Meßaufnehmer Sensor system hydrogen sensor business.industry Metals and Alloys Readout electronics long-term stability Langzeitverhalten Condensed Matter Physics Switched capacitor Chip Surfaces Coatings and Films Electronic Optical and Magnetic Materials Capacitor chemistry Optoelectronics business Wasserstoff |
| Zdroj: | Sensors and Actuators B: Chemical. 6:162-164 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/0925-4005(92)80049-4 |
| Popis: | Gas-sensitive MOS capacitors with on-chip readout electronics are investigated. The use of these capacitors in combination with switched capacitor circuitry enables a.c. operation of the device to take place. Measurements show an improved long-term stability. A comparison between the integrated sensor system and a gas-sensitive FET integrated on the same chip allows these different types of sensors to be directly compared. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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