Charging effect induced by electron beam irradiation: a review
| Autor: | Jiangwei Liu, Chao Li, Bo Da, Zejun Ding |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
502 electron spectroscopy
Materials science experiment Monte Carlo method New topics/Others Review Article Electron 202 dielectrics / piezoelectrics / insulators electron beam irradiation Computational physics Electron beam irradiation 212 surface and interfaces TA401-492 General Materials Science Materials of engineering and construction. Mechanics of materials Charging effect Monte Carlo TP248.13-248.65 70 New topics/Others Biotechnology |
| Zdroj: | Science and Technology of Advanced Materials article-version (VoR) Version of Record Science and Technology of Advanced Materials, Vol 22, Iss 1, Pp 932-971 (2021) |
| ISSN: | 1878-5514 1468-6996 |
| DOI: | 10.1080/14686996.2021.1976597 |
| Popis: | Charging effect frequently occurs when characterizing nonconductive materials using electrons as probes and/or signals and can impede the acquisition of useful information about the material under investigation. It is not adequate to investigate it merely by experiments, but theoretical investigations, for which the Monte Carlo method is a suitable tool, are also necessary. In this paper we review Monte Carlo simulations and selected experiments, intending to provide general insight into the charging effects induced by electron beam irradiation. We will introduce categories of the charging effect, the theoretical framework that is adopted in Monte Carlo modeling of the charging effect and present some typical simulation results. At last, with the knowledge on charging effect imparted by the above contents, we will discuss the measures that can be used for minimizing it. Graphical Abstract |
| Databáze: | OpenAIRE |
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