Measurement of nonlinear piezoelectric coefficients using a micromechanical resonator
| Autor: | Pritiraj Mohanty, Joseph A. Boales, Shyamsunder Erramilli |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Microelectromechanical systems
0209 industrial biotechnology Materials science Piezoelectric coefficient Physics and Astronomy (miscellaneous) Condensed Matter - Mesoscale and Nanoscale Physics business.industry Wide-bandgap semiconductor FOS: Physical sciences 02 engineering and technology Physics - Applied Physics Applied Physics (physics.app-ph) Nitride 021001 nanoscience & nanotechnology Piezoelectricity Computer Science::Other Resonator Condensed Matter::Materials Science 020901 industrial engineering & automation Harmonics Mesoscale and Nanoscale Physics (cond-mat.mes-hall) Optoelectronics Mechanical resonance 0210 nano-technology business |
| DOI: | 10.48550/arxiv.1805.09696 |
| Popis: | We describe and demonstrate a method by which the nonlinear piezoelectric properties of a piezoelectric material may be measured by detecting the force that it applies on a suspended micromechanical resonator at one of its mechanical resonance frequencies. Resonators are used in countless applications; this method could provide a means for better-characterizing material behaviors within real MEMS devices. Further, special devices can be designed to probe this nonlinear behavior at specific frequencies with enhanced signal sizes. The resonators used for this experiment are actuated using a 1-$\mu$m-thick layer of aluminum nitride. When driven at large amplitudes, the piezoelectric layer generates harmonics, which are measurable in the response of the resonator. In this experiment, we measured the second-order piezoelectric coefficient of aluminum nitride to be $-(23.1\pm14.1)\times10^{-22}\ \mathrm{m/V^2}$. Comment: 5 pages, 3 figures, preprint |
| Databáze: | OpenAIRE |
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