Preparation and characterisation of PZT films by RF-magnetron sputtering
| Autor: | Raluca C. Frunza, Liliana Mitoseriu, Felicia Gheorghiu, Dan Ricinschi, Radu Apetrei, Dumitru Luca, Masanori Okuyama |
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| Rok vydání: | 2011 |
| Předmět: |
Materials science
Mechanical Engineering Metals and Alloys Analytical chemistry Dielectric Sputter deposition Ferroelectricity Dielectric spectroscopy Piezoresponse force microscopy Mechanics of Materials Sputtering visual_art Materials Chemistry visual_art.visual_art_medium Ceramic Composite material Perovskite (structure) |
| Zdroj: | Journal of Alloys and Compounds. 509:6242-6246 |
| ISSN: | 0925-8388 |
| Popis: | Stoichiometric films were prepared by rf-magnetron sputtering from a Pb(Zr 0.54 Ti 0.46 )O 3 ceramic target onto Au-electroded substrates of alumina. During deposition the substrate holder was kept at a temperature of 300 °C. Post-deposition heat treatment in air at 650 °C was carried to promote the full crystallization and to result in pure perovskite PZT phase. SEM–EDX measurements for the films were performed both on surface and on cross-section. The impedance spectroscopy data demonstrates that the films have rather good dielectric properties and low losses. The recorded P–E loops prove their macroscopic ferroelectric characteristics, while piezoresponse force microscopy experiments confirm a nanoscale switching mechanism based on domain nucleation-growth. |
| Databáze: | OpenAIRE |
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