Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition
| Autor: | Terhi Hirvikorpi, Jari Vartiainen, Erkki Salo, Väinö Kilpi, Wei-Min Li, Juhana Kostamo, Ali Harlin, Sven Lindfors, Mika Vähä-Nissi, Juha Nikkola, Eija Kenttä, Risto Laine |
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| Rok vydání: | 2014 |
| Předmět: |
Materials science
polymer Nanotechnology Roll-to-roll processing aluminum oxide Atomic layer deposition Materials Chemistry SDG 7 - Affordable and Clean Energy Thin film chemistry.chemical_classification Layer by layer Metals and Alloys Surfaces and Interfaces Polymer Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Flexible display Printed electronics atomic layer deposition flexible material barrier roll-to-roll Layer (electronics) |
| Zdroj: | Hirvikorpi, T, Laine, R, Vähä-Nissi, M, Kilpi, V, Salo, E, Lia, W-M, Lindfors, S, Vartiainen, J, Kenttä, E, Nikkola, J, Harlin, A & Kostamo, J 2014, ' Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition ', Thin Solid Films, vol. 550, pp. 164-169 . https://doi.org/10.1016/j.tsf.2013.10.148 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2013.10.148 |
| Popis: | Thin (30–40 nm) and highly uniform Al 2 O 3 coatings have been deposited at relatively low temperature of 100 °C onto various polymeric materials employing the atomic layer deposition (ALD) technique, both batch and roll-to-roll (R2R) mode. The applications for ALD have long been limited those feasible for batch processing. The work demonstrates that R2R ALD can deposit thin films with properties that are comparable to the film properties fabricated by in batch. This accelerates considerably the commercialization of many products, such as flexible, printed electronics, organic light-emitting diode lighting, third generation thin film photovoltaic devices, high energy density thin film batteries, smart textiles, organic sensors, organic/recyclable packaging materials, and flexible displays, to name a few. |
| Databáze: | OpenAIRE |
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