Measuring the Quality Factor in MEMS Devices
| Autor: | Savas Ozdemir, Mustafa Yavuz, Sohail Akhtar, M E Khater, Resul Saritas, Eihab M. Abdel-Rahman, Ozgur E. Gunal |
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| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
Microelectromechanical systems
Engineering Cantilever quality factor MEMS particle swarm optimization logarithmic decrement business.industry Mechanical Engineering Logarithmic decrement Bandwidth (signal processing) Particle swarm optimization Natural frequency Computer Science::Other Control and Systems Engineering Control theory Q factor Electrical and Electronic Engineering business Actuator |
| Zdroj: | Micromachines Volume 6 Issue 12 Pages 1935-1945 Micromachines; Volume 6; Issue 12; Pages: 1935-1945 |
| ISSN: | 2072-666X |
| DOI: | 10.3390/mi6121466 |
| Popis: | This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three configurations: free standing, arc-shaped, and s-shaped. It is found that damping estimation techniques that seek to minimize the deviation between the response of an “assumed” linear oscillator and the measured time-history of the motions are superior to those traditional techniques, such as logarithmic decrement and half-power bandwidth. Further, it is found that Q increases three-fold as the actuator contact with the substrate evolves from a line to an area. |
| Databáze: | OpenAIRE |
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