Effect of vaporization and melt ejection on laser machining of silica glass micro-optical components
| Autor: | Howard J. Baker, Francisco Villarreal, G.A.J. Markillie, Denis R. Hall |
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| Rok vydání: | 2002 |
| Předmět: |
Fabrication
Materials science business.industry Materials Science (miscellaneous) medicine.medical_treatment Laser beam machining Physics::Optics Radiation Laser Ablation Industrial and Manufacturing Engineering law.invention Condensed Matter::Soft Condensed Matter Optics Machining law Vaporization medicine Business and International Management Composite material business Displacement (fluid) |
| Zdroj: | Applied optics. 41(27) |
| ISSN: | 1559-128X |
| Popis: | A new regime for silica glass machining for micro-optical fabrication applications, which uses pulsed CO2 laser radiation in the 2.5-100-micros pulse width region that has been generated by an acousto-optic modulator, is investigated. A filamentary melt ejection process that generates fibers and significant melt displacement limits machining quality below 30-micros pulse width. Ablation and melt ejection thresholds are quantified relative to pulse width, and the region from 30 to 50 micros is identified for low-threshold, smooth machining without melt displacement and ejection effects. |
| Databáze: | OpenAIRE |
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