In-situ observation of mass transfer in the CF-PVT growth process by X-ray imaging
| Autor: | Didier Chaussende, Magali Ucar, Roland Madar, Peter J. Wellmann, Michel Pons |
|---|---|
| Přispěvatelé: | Laboratoire des matériaux et du génie physique (LMGP ), Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), INSTITUT FUR WERKSTOFFWISSENSCHAFTEN 6 (WW6), Friedrich-Alexander Universität Erlangen-Nürnberg (FAU), Laboratoire de thermodynamique et physico-chimie métallurgiques (LTPCM), Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique de Grenoble (INPG), NOVASiC, Robert P. Devaty, David J. Larkin and Stephen E. Saddow |
| Předmět: |
010302 applied physics
In situ Materials science Mechanical Engineering X-ray Analytical chemistry 02 engineering and technology [CHIM.MATE]Chemical Sciences/Material chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Mechanics of Materials Chemical physics Mass transfer 0103 physical sciences General Materials Science Sublimation (phase transition) Seeding 0210 nano-technology Growth cell |
| Zdroj: | Scopus-Elsevier Materials Science Forum |
| Popis: | The development of the Continuous Feed Physical Vapour Transport (CF-PVT) process requires a perfect control of each phenomenon in the growth cell. Along this line, the present paper gives some inputs on the CF-PVT mass transfer regimes with respect to the process parameters, both from qualitative and quantitative viewpoints. For example, two boundary cases have been evidenced depending on the temperature. At low temperature, the growth is limited by the sublimation step between the source and the seed. In this case, the CF-PVT process can be roughly assimilated to the classical seeded sublimation technique. At high temperature, the process is limited by the feeding step, i.e. the CVD deposition and infiltration on the lower part of the source. Measurements are correlated to in-situ X-ray imaging. The ability of the X-ray imaging to in-situ qualify and quantify the mass transfer is discussed. |
| Databáze: | OpenAIRE |
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