Structural investigation of the titanium/diamond film interface
| Autor: | Gianfranco Vitali, Maria Letizia Terranova, Marco Rossi |
|---|---|
| Rok vydání: | 1996 |
| Předmět: |
Materials science
Reflection high-energy electron diffraction Material properties of diamond General Physics and Astronomy Diamond Titanium hydride chemistry.chemical_element Chemical vapor deposition engineering.material CVD Carbide electron diffraction diamond chemistry.chemical_compound Crystallography chemistry engineering Composite material Thin film Titanium |
| Zdroj: | Scopus-Elsevier |
| ISSN: | 1089-7550 0021-8979 |
| Popis: | Reflection high‐energy electron diffraction (RHEED) technique, with the possibility to shift, rotate, and tilt the sample with respect to the electron beam, has been used to investigate the structure of the transition layers formed at the interface between titanium substrate and diamond films. The diamond films were deposited on partially masked titanium sheets by means of the chemical vapor deposition technique, using CH4/H2 mixtures activated by hot filament. Deposition experiments have been performed at 650 and 730 °C. The RHEED analysis has been carried out in selected area conditions on the boundary between coated and uncoated regions; it enabled us to detect and characterise the inhomogeneous and complex structural configuration of the diamond/titanium interface. For the samples deposited at 650 °C we identified, starting from the titanium surface: a mixed phase constituted by titanium hydride and carbide precipitates, graphitic clusters embedded into a titanium hydride/carbide phase, TiC layers, an... |
| Databáze: | OpenAIRE |
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