| Autor: |
V.I. Manilov, A.D. Maksimenko, B.M. Kovalchuk, V.B. Zorin, S. V. Ivanov, G.V. Smorudov, N. G. Shubkin, V. A. Vizir, V. V. Chervyakov |
| Rok vydání: |
2002 |
| Předmět: |
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| Zdroj: |
IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255). |
| DOI: |
10.1109/ppps.2001.960755 |
| Popis: |
The generator is intended to supply plasma immerse ion implanters. It has the following parameters: voltage pulse amplitude - (20/spl divide/60) kV, current pulse amplitude - (100/spl divide/40) A, pulse length - (5/spl divide/20) /spl mu/s, leading edge length - 1 /spl mu/s, decay length - 2 /spl mu/s, pulse frequency - up to 1000 Hz, average power - up to 10 kW. The generator is made by the scheme of a modulator with partial capacity discharge. A high-power modulator tube GMI-29A1 (40 kV, 200 A) is used as a switch. A driver is made at a JGBT transistor. A pulse from modulator is applied by the cable to the step-up pulsed transformer placed near the implanter. The transformer has a winding switch allowing controlling the output voltage from 20 to 60 kV at a distance by 6 steps. Smooth control is realized by the power supply. The modulator has the current protection of the power supply and rapid (0.5 /spl mu/s) current protection of the modulator tube. The modulator can be controlled both from the local control board and at a distance - from the computer. The generator has a load equivalent on the basis of a water resistor. The generator also can be used as an accelerating voltage power supply for charged particle beam sources. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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