Digital electronics for inertial MEMS and space applications
| Autor: | Raphaël Lévy, Leopold Delahaye, Jean Guerard |
|---|---|
| Přispěvatelé: | DPHY, ONERA, Université Paris Saclay (COmUE) [Châtillon], ONERA-Université Paris Saclay (COmUE) |
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
Computer science
GYROSCOPE 02 engineering and technology Accelerometer FREQUENCY SYNTHESIS SYNTHÈSE NUMÉRIQUE DE FRÉQUENCE ACCELEROMETER Delay 0202 electrical engineering electronic engineering information engineering Electronic engineering Demodulation [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] GYROMETRE VIBRANT Field-programmable gate array FPGA Digital electronics Decimation RESONATOR business.industry 020208 electrical & electronic engineering [PHYS.PHYS.PHYS-SPACE-PH]Physics [physics]/Physics [physics]/Space Physics [physics.space-ph] ACCELEROMETRE LAME VIBRANTE MEMS Direct digital synthesizer Modulation business |
| Zdroj: | Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2018) Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2018), May 2018, ROME, Italy. ⟨10.1109/DTIP.2018.8394236⟩ |
| DOI: | 10.1109/DTIP.2018.8394236⟩ |
| Popis: | International audience; This paper presents an electronic platform for driving resonant MEMS in inertial sensors, and possibly other resonant or carrier based sensors. The architecture is fully integrated in a digital programmable device (FPGA), and avoids several critical components when dealing with space qualification. The core hardware functions are Direct Digital Synthesis , Sigma-Delta modulation, Time to Digital conversion. These functions are driven by an embedded processor, managing a second level of software functions : synchronous demodulation, Phase-Locked Loop, decimation, digital communications. The specificity of this digital platform is to avoid usual Analog-To-Digital and Digital-To-Analog conversion. All measurements are performed by means of digital delay counting, yet allowing an interesting resolution of 16 bits even on carried signals up to 100 kHz with a frequency resolution better than 1 µHz (11 digits on the frequency). A prototype of vibrating accelerometer has been integrated and characterized to experience the electronic performance on a real sensor. The results show that the embedded architecture is already close to the performance obtained with separate equipments on the test bench. |
| Databáze: | OpenAIRE |
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