Uniform Non-stoichiometric Titanium Nitride Thin Films for Improved Kinetic Inductance Detector Arrays
| Autor: | G. Coiffard, Alessandro Monfardini, K. F. Schuster, Martino Calvo, A. Catalano, J. Goupy, S. Pignard, E. F. C. Driessen |
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| Přispěvatelé: | Institut de RadioAstronomie Millimétrique (IRAM), Centre National de la Recherche Scientifique (CNRS), Laboratoire des matériaux et du génie physique (LMGP ), Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Cryogénie (Cryo), Institut Néel (NEEL), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Laboratoire de Physique Subatomique et de Cosmologie (LPSC), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Hélium : du fondamental aux applications (HELFA) |
| Rok vydání: | 2016 |
| Předmět: |
Physics - Instrumentation and Detectors
[PHYS.ASTR.IM]Physics [physics]/Astrophysics [astro-ph]/Instrumentation and Methods for Astrophysic [astro-ph.IM] Fabrication Materials science FOS: Physical sciences chemistry.chemical_element 01 natural sciences chemistry.chemical_compound Sputtering 0103 physical sciences General Materials Science Wafer Thin film 010306 general physics 010303 astronomy & astrophysics Noise-equivalent power business.industry Instrumentation and Detectors (physics.ins-det) Condensed Matter Physics Titanium nitride Atomic and Molecular Physics and Optics chemistry Optoelectronics Tin business Microwave |
| Zdroj: | Journal of Low Temperature Physics Journal of Low Temperature Physics, Springer Verlag (Germany), 2016, 184 (3-4), pp.654-660. ⟨10.1007/s10909-016-1489-9⟩ |
| ISSN: | 1573-7357 0022-2291 |
| DOI: | 10.1007/s10909-016-1489-9 |
| Popis: | We describe the fabrication of homogeneous sub-stoichiometric titanium nitride films for microwave kinetic inductance detector (mKID) arrays. Using a 6 inch sputtering target and a homogeneous nitrogen inlet, the variation of the critical temperature over a 2 inch wafer was reduced to 7 pages, 4 figures, submitted to Journal of low temperature physics, Proceedings of LTD-16 |
| Databáze: | OpenAIRE |
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