Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation
| Autor: | L.K. Cheng, M. Lagioia, Jose Pozo, W.J. Westerveld, P.J. Harmsma, P. Bodis, S. Yang, Mirvais Yousefi, E. Tabak, H. P. Urbach, K. Green, R.A. Nieuwland, D.M.R. Lo Cascio, H. v.d. Berg, J.-P. Staats, R. Schmits |
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| Rok vydání: | 2011 |
| Předmět: |
Materials science
strain sensor Physics::Instrumentation and Detectors NI - Nano Instrumentation Optical ring resonators Silicon on insulator Hardware_PERFORMANCEANDRELIABILITY Waveguide (optics) photonic sensing law.invention Resonator Physics & Electronics Robustness (computer science) law Electronic engineering pressure sensor harsh environments SOI TS - Technical Sciences business.industry Physics Pressure sensor ring resonators silicon-on-insulator Interferometry ultrasound sensor 3x3 interferometer Optoelectronics Photonics on chip interrogation business |
| Zdroj: | Proceedings International Conference on Transparent Optical Networks (ICTON), 1-4 |
| DOI: | 10.1109/icton.2011.5970854 |
| Popis: | In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3x3 interferometer. |
| Databáze: | OpenAIRE |
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