Radiation effects on surface micromachined comb drives and microengines

Autor:	L.P. Schanwald, J.H. Smith, Barney Lee Doyle, David S. Walsh, Marty R. Shaneyfelt, J.R. Schwank, J.J. Sniegowsi, P.S. Winokur, N.F. Smith, K.A. Peterson
Rok vydání:	1998
Předmět:	Nuclear and High Energy Physics Range (particle radiation) Materials science business.industry Biasing Radiation Fault (power engineering) Fluence Surface micromachining Nuclear Energy and Engineering Comb drive Miniaturization Optoelectronics Electrical and Electronic Engineering business
Zdroj:	IEEE Transactions on Nuclear Science. 45:2789-2798
ISSN:	1558-1578 0018-9499
DOI:	10.1109/23.736529
Popis:	Surface micromachined comb drive and microengine fluence thresholds and failure modes were investigated in X-ray, electron, and proton total-dose environments. Very high fluence levels were necessary to induce motion degradation or lockup for normal device biasing or operation. For the abnormal biasing of ungrounded or partially grounded dice, significantly lower fault thresholds were observed, but still in a medium or high fluence range.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::efb766f7f00bc1f6bfa9ca19d731480a https://doi.org/10.1109/23.736529 Zobrazit plný text záznamu