Scalable, Modular Three-Dimensional Silicon Microelectrode Assembly via Electroless Plating
| Autor: | Anthony Zorzos, Edward S. Boyden, Jacob Bernstein, Justin P. Kinney, Clifton G. Fonstad, Nancy Kopell, Caroline Moore-Kochlacs, Joerg Scholvin |
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| Přispěvatelé: | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology. Media Laboratory, Scholvin, Jorg, Zorzos, Anthony Nicholas, Kinney, Justin, Bernstein, Jacob G, Moore-Kochlacs, Caroline, Fonstad Jr, Clifton G, Boyden, Edward |
| Rok vydání: | 2018 |
| Předmět: |
Fabrication
Materials science lcsh:Mechanical engineering and machinery microelectrodes 02 engineering and technology Article 03 medical and health sciences 0302 clinical medicine Electrode array three-dimensional lcsh:TJ1-1570 Electrical and Electronic Engineering electroless plating Electronic circuit business.industry Mechanical Engineering Electroless nickel plating neural recording silicon probe Modular design 021001 nanoscience & nanotechnology Electrical contacts Microelectrode Control and Systems Engineering Electrode electrode array Optoelectronics 0210 nano-technology business 030217 neurology & neurosurgery |
| Zdroj: | Multidisciplinary Digital Publishing Institute Micromachines Micromachines, Vol 9, Iss 9, p 436 (2018) Volume 9 Issue 9 |
| Popis: | We devised a scalable, modular strategy for microfabricated 3-D neural probe synthesis. We constructed a 3-D probe out of individual 2-D components (arrays of shanks bearing close-packed electrodes) using mechanical self-locking and self-aligning techniques, followed by electroless nickel plating to establish electrical contact between the individual parts. We detail the fabrication and assembly process and demonstrate different 3-D probe designs bearing thousands of electrode sites. We find typical self-alignment accuracy between shanks of National Institutes of Health (U.S.) (Award DP1NS087724) National Institutes of Health (U.S.) (Grant R01NS067199) National Institutes of Health (U.S.) (Grant 2R44NS070453-03A1) National Institutes of Health (U.S.) (Grant 1R01NS102727) National Institutes of Health (U.S.) (Grant 1R43MH101943) National Institutes of Health (U.S.) (Grant 1R43MH109332) National Institutes of Health (U.S.) (Grant 1R24MH106075) National Institutes of Health (U.S.) (Grant R01DA029639) National Science Foundation (U.S.) (Grant DMS-1042134) National Science Foundation (U.S.) (Grant CBET-1053233) United States. Defense Advanced Research Projects Agency (Grant HR0011-14-2-0004) |
| Databáze: | OpenAIRE |
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