| Autor: |
Didier Viquerat, Hans Langen, Rolf Wüthrich, Valia Fascio |
| Rok vydání: |
2003 |
| Předmět: |
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| Zdroj: |
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478). |
| DOI: |
10.1109/mhs.1999.820003 |
| Popis: |
3D micropatterning is done in an electrolyte with electrodischarge assisted etching at the tool tip. Reported are the influence of the percentage of sodium ions in the sample, the applied voltage and the distance between tool and glass sample, and the induced local composition modifications. SIMS analysis has shown the diffusion and extraction of sodium ions, dissolution of SiO/sub 2//sup $/and local substitution of Na/sup +/ with H/sup +/ ions. The study of such aspects will contribute to the control of 3D microstructuring and to the local surface modification. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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