Sub-mA threshold current vertical cavity surface emitting lasers with a simple fabrication process

Autor:	Sara Gillgrass, Jack Baker, Curtis Hentschel, J. Iwan Davies, Craig P. Allford, Samuel Shutts, Peter Michael Smowton
Jazyk:	angličtina
Rok vydání:	2021
Předmět:	Surface (mathematics) Fabrication Materials science business.industry Aperture Process (computing) Laser law.invention Vertical-cavity surface-emitting laser law Chemical-mechanical planarization Optoelectronics Photonics business
ISSN:	2575-274X
Popis:	sub-mA threshold currents are achieved for VCSELs using a simplified fabrication process which employs etched oxidation-vias for definition of the VCSEL aperture, as well as ease in formation of a bond pad without the need for bisbenzocyclobutane planarisation.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::eede753d1e2ad51dd09c569f9f529f28 https://orca.cardiff.ac.uk/id/eprint/150499/1/IPC-2021-Paper-VQF-PrePrintCopyrightStatement.pdf Zobrazit plný text záznamu