Improving the sensitivity of X-ray microanalysis in the analytical electron microscope

Autor: Nestor J. Zaluzec
Rok vydání: 2018
Předmět:
Zdroj: Ultramicroscopy. 203
ISSN: 1879-2723
Popis: A study of the influence of experimental parameters on the sensitivity of x-ray energy dispersive spectroscopy in the analytical electron microscope from 20–200 kV is conducted. Optimization of conditions in the next generation of aberration corrected AEM instrument coupled with an array configuration of SDD detectors can potentially yield a 10–20 fold improvement over older Si(Li) systems still in use today.
Databáze: OpenAIRE