Improving the sensitivity of X-ray microanalysis in the analytical electron microscope
Autor: | Nestor J. Zaluzec |
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Rok vydání: | 2018 |
Předmět: |
010302 applied physics
Materials science Analytical electron microscope Detector Analytical chemistry Energy-dispersive X-ray spectroscopy 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials X ray microanalysis 0103 physical sciences 0210 nano-technology Instrumentation |
Zdroj: | Ultramicroscopy. 203 |
ISSN: | 1879-2723 |
Popis: | A study of the influence of experimental parameters on the sensitivity of x-ray energy dispersive spectroscopy in the analytical electron microscope from 20–200 kV is conducted. Optimization of conditions in the next generation of aberration corrected AEM instrument coupled with an array configuration of SDD detectors can potentially yield a 10–20 fold improvement over older Si(Li) systems still in use today. |
Databáze: | OpenAIRE |
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