Simulation-Based Development of a New Cylindrical-Cavity Microwave-Plasma Reactor for Diamond-Film Synthesis
| Autor: | Gan Zhiyin, Wang Qijun, Sheng Liu, Wu Gai, Bo Yang, Junheng Pan |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Materials science
General Chemical Engineering microwave-plasma chemical-vapor deposition (MPCVD) diamond films 02 engineering and technology engineering.material 01 natural sciences law.invention Inorganic Chemistry symbols.namesake Optical microscope Physics::Plasma Physics law 0103 physical sciences lcsh:QD901-999 General Materials Science Diffractometer 010302 applied physics Spectrometer business.industry cylindrical cavity Diamond Plasma 021001 nanoscience & nanotechnology Condensed Matter Physics Ion source engineering symbols Optoelectronics lcsh:Crystallography 0210 nano-technology business Raman spectroscopy Cavity wall |
| Zdroj: | Crystals, Vol 9, Iss 6, p 320 (2019) Crystals Volume 9 Issue 6 |
| ISSN: | 2073-4352 |
| Popis: | A 2.45 GHz microwave-plasma chemical-vapor deposition (MPCVD) reactor was designed and built in-house by collaborating with Guangdong TrueOne Semiconductor Technology Co., Ltd. A cylindrical cavity was designed as the deposition chamber and a circumferential coaxial-mode transformer located at the top of the cavity was adopted as the antenna. Two quartz-ring windows that were placed far away from the plasma and cooled by water-cooling cavity walls were used to affix the antenna to the cavity and act as a vacuum seal for the reactor, respectively. This design improved the sealing and protected the quartz windows. In addition, a numerical simulation was proposed to predict the electric-field and plasma-density distributions in the cavity. Based on the simulation results, a microwave-plasma reactor with TM021 mode was built. The leak rate of this new reactor was tested to be as low as 1 × 10&minus 8 Pa· m3· s&minus 1, and the maximal microwave power was as high as 10 kW. Then, single-crystal diamond films were grown with the morphology and crystalline quality characterized by an optical microscope, atomic force microscope (AFM), Raman spectrometer, photoluminescence (PL) spectrometer, and high-resolution X-ray diffractometer. It was shown that the newly developed MPCVD reactor can produce diamond films with high quality and purity. |
| Databáze: | OpenAIRE |
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