Nested trampoline resonators for optomechanics
| Autor: | F. M. Buters, Dirk Bouwmeester, H. J. Eerkens, B. Perock, Gesa Welker, S. de Man, Brian Pepper, Kier Heeck, Matthew Weaver, Fernando Luna |
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| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
Quantum Physics
Materials science Physics and Astronomy (miscellaneous) business.industry FOS: Physical sciences 02 engineering and technology 021001 nanoscience & nanotechnology Distributed Bragg reflector 01 natural sciences Resonator Finesse Vibration isolation Quality (physics) Q factor 0103 physical sciences Optoelectronics Trampoline 010306 general physics 0210 nano-technology business Quantum Physics (quant-ph) Optomechanics Optics (physics.optics) Physics - Optics |
| Zdroj: | Applied Physics Letters, 108(3), 033501 Applied Physics Letters |
| Popis: | Two major challenges in the development of optomechanical devices are achieving a low mechanical and optical loss rate and vibration isolation from the environment. We address both issues by fabricating trampoline resonators made from low pressure chemical vapor deposition (LPCVD) Si$_3$N$_4$ with a distributed bragg reflector (DBR) mirror. We design a nested double resonator structure with 80 dB of mechanical isolation from the mounting surface at the inner resonator frequency, and we demonstrate up to 45 dB of isolation at lower frequencies in agreement with the design. We reliably fabricate devices with mechanical quality factors of around 400,000 at room temperature. In addition these devices were used to form optical cavities with finesse up to 181,000 $\pm$ 1,000. These promising parameters will enable experiments in the quantum regime with macroscopic mechanical resonators. |
| Databáze: | OpenAIRE |
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