110 GHz on-wafer measurement comparison on alumina substrate
| Autor: | Matthias Ohlrogge, Ralf Doerner, Uwe Arz, Thorsten Probst, Roger Lozar |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
on-wafer
Materials science business.industry System of measurement 020208 electrical & electronic engineering 020206 networking & telecommunications 02 engineering and technology Substrate (electronics) substrate calibration Optics visual_art 0202 electrical engineering electronic engineering information engineering Calibration visual_art.visual_art_medium Wafer Ceramic business Focus (optics) probes |
| DOI: | 10.7795/empir.14ind02.ca.20190403a |
| Popis: | This paper reports on initial results of a three-party on-wafer measurement comparison carried out on a custom-made alumina calibration substrate in the frequency range up to 110 GHz. The correction of the vector network analyzer measurement is done with the highly accurate multiline TRL (mTRL) calibration. The focus of the investigation is on the influence of the measurement system, the probe geometry and operator skills. The results of the calibrations are presented and the influence on selected devices under tests (DUT) are evaluated for different measurement configurations. |
| Databáze: | OpenAIRE |
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